JPH0131728B2 - - Google Patents

Info

Publication number
JPH0131728B2
JPH0131728B2 JP57004538A JP453882A JPH0131728B2 JP H0131728 B2 JPH0131728 B2 JP H0131728B2 JP 57004538 A JP57004538 A JP 57004538A JP 453882 A JP453882 A JP 453882A JP H0131728 B2 JPH0131728 B2 JP H0131728B2
Authority
JP
Japan
Prior art keywords
thin film
substrate
silicon wafer
recess
piezoelectric thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57004538A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58121815A (ja
Inventor
Eiji Iegi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP453882A priority Critical patent/JPS58121815A/ja
Publication of JPS58121815A publication Critical patent/JPS58121815A/ja
Publication of JPH0131728B2 publication Critical patent/JPH0131728B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP453882A 1982-01-14 1982-01-14 圧電共振子 Granted JPS58121815A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP453882A JPS58121815A (ja) 1982-01-14 1982-01-14 圧電共振子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP453882A JPS58121815A (ja) 1982-01-14 1982-01-14 圧電共振子

Publications (2)

Publication Number Publication Date
JPS58121815A JPS58121815A (ja) 1983-07-20
JPH0131728B2 true JPH0131728B2 (en]) 1989-06-27

Family

ID=11586815

Family Applications (1)

Application Number Title Priority Date Filing Date
JP453882A Granted JPS58121815A (ja) 1982-01-14 1982-01-14 圧電共振子

Country Status (1)

Country Link
JP (1) JPS58121815A (en])

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61100030U (en]) * 1984-12-05 1986-06-26
JPH0650255B2 (ja) * 1987-03-31 1994-06-29 シャープ株式会社 シリコンマイクロセンサの製造方法
JP4513169B2 (ja) * 2000-05-17 2010-07-28 株式会社村田製作所 圧電フィルタ、通信装置および圧電フィルタの製造方法
JP2003229743A (ja) 2001-11-29 2003-08-15 Murata Mfg Co Ltd 圧電フィルタ、通信装置および圧電フィルタの製造方法
JP2004147246A (ja) 2002-10-28 2004-05-20 Matsushita Electric Ind Co Ltd 圧電振動子、それを用いたフィルタ及び圧電振動子の調整方法
US7327205B2 (en) 2004-03-12 2008-02-05 Murata Manufacturing Co., Ltd. Demultiplexer and surface acoustic wave filter
WO2025070363A1 (ja) * 2023-09-29 2025-04-03 株式会社大真空 圧電振動デバイスの周波数調整方法および圧電振動デバイス

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5737917A (en) * 1980-08-14 1982-03-02 Fujitsu Ltd Plezoelectric oscillator

Also Published As

Publication number Publication date
JPS58121815A (ja) 1983-07-20

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